TEL Tokyo Electron 5087-402251-17 CPHP General Chamber CPHG Type 1 Lithius Spare

Description

TEL Tokyo Electron 5087-402251-17 CPHP General Chamber CPHG Type 1 Lithius Spare
Inventory # A-7531
This TEL Tokyo Electron 5087-402251-17 CPHP General Chamber CPHG is used surplus. The physical condition is great, but there are signs of previous use and handling. Removed from a TEL Tokyo Electron Clean Track Lithius System.
Specifications
Part No: 5087-402251-17
Model No: CPHP General Chamber CPHG with Alignment
Plate Process Station
E-CPHP
Removed from a TEL Tokyo Electron Clean Track Lithius System
Installed Components
PCB Part No: HTE-MC1-B-12, BOARD, CONN HPI #01
PCB Part No: HTE-TC3-A-11, BOARD, IF TC CTRL #03
Omron Part No: E5ZT-N08TC01-2 (Qty. 1)
Omron Part No: E5ZT-W08-2 (Qty. 1)
Convum Part No: MPS-E4MS-GHA-TLQ, MPS
Parts List:
Assembly Part No: 5087-402251-17 FRAME (HP) ASSY
5010-101313-12: FRAME(HP) (Qty. 1)
5003-200012-11: DUCT(L) (Qty. 1)
5003-200013-11: DUCT(R) (Qty. 1)
5010-309519-11: SHUTTER(L) (Qty. 1)
5010-309520-11: SHUTTER(R) (Qty. 1)
5010-407356-11: BRACKET (Qty. 2)
5010-309775-11: PLATE (Qty. 2)
5010-407435-11: SEAL (Qty. 2)
5010-404625-11: PLATE (Qty. 2)
5003-300040-11: PORT (Qty. 2)
5010-406012-11: BRACKET (Qty. 1)
5010-202681-11: COVER,UNDER (Qty. 1)
5010-405477-11: PLATE (Qty. 1)
5010-404628-11: PIN (Qty. 4)
5010-405474-11: PLATE (Qty. 1)
5010-308929-11: BRACKET(L) (Qty. 1)
5010-308931-11: BRACKET(R) (Qty. 1)
028-003339-1: FITTING,TUBE M-5HL-6 (Qty. 2)
028-006361-1: FITTING,TUBE EUC6-TR (Qty. 2)
5086-400749-11: SENSOR,PROXIMITY CPHP #01 (Qty. 1)
5086-401773-11: SENSOR,PROXIMITY CPHP #02 (Qty. 1)
026-102041-1: SET PLATE TM-147-1-5563 WASHER (Qty. 4)
033-000007-1: NUT M4 SUS304 (Qty. 4)
020-000005-1: CAP SCREW M3*6 SUS304 (Qty. 18)
020-001091-1: CAP SCREW M4*16 SUS304 (Qty. 8)
028-005698-1: FITTING,TUBE BC6 (Qty. 2)
020-000518-1: CAP SCREW M3*4 SUS304 (Qty. 13)
020-000414-1: CAP SCREW M2*4 SUS304 (Qty. 4)
020-002913-1: CAP SCREW M4*8 SUS304 W/SPR & FLAT WASH ER (Qty. 8)
Assembly Part No: 5085-409714-15 CHAMBER ASSY
5010-101574-11: PLATE (Qty. 1)
5010-101311-11: RING (1) (Qty. 1)1
5010-101515-11: RING(2) (Qty. 1)
5010-201615-11: RING (3) (Qty. 1)
5004-100014-11: PLATE(1) (509510053911 (Qty. 1)
5004-100016-11: PLATE(2) (509510054011 (Qty. 1)
5004-300061-11: ROD (509510054211 (Qty. 1)
5010-402181-11: SPACER (Qty. 4)
5010-406973-11: BLOCK (Qty. 1)
5010-401246-11: MESH (Qty. 1)
5010-202682-11: BRACKET (Qty. 1)
5010-306605-13: ARM(L) (Qty. 1)
5010-402180-11: BRACKET (Qty. 1)
5010-202499-11: TUBE,IN (Qty. 1)
5010-203429-11: TUBE,OUT (Qty. 1)
5010-405648-11: PLATE (Qty. 2)
027-003302-1: O-RING PARFLO S-7 BLACK (Qty. 1)
028-017536-1: FITTING,TUBE IN-233-1369 (Qty. 1)
028-018107-1: FITTING,TUBE M5H-DPH00436 (Qty. 1)
020-000005-1: CAP SCREW M3*6 SUS304 (Qty. 12)
020-000009-1: CAP SCREW M3*10 SUS304 (Qty. 5)
020-000020-1: CAP SCREW M3*20 SUS304 (Qty. 14)
020-000561-1: SET SCREW M5*8 SUS304 (Qty. 4)
033-000012-1: NUT M5 SUS304 (Qty. 4)
028-007168-1: FITTING,RESIN EUL1/4-C1 (Qty. 1)
020-000414-1: CAP SCREW M2*4 SUS304 (Qty. 4)
5010-306604-12: ARM(R) (Qty. 1)
5010-406011-11: BRACKET (Qty. 1)
020-000083-1: CAP SCREW M6*12 SUS304 (Qty. 4)
020-000030-1: CAP SCREW M4*8 SUS304 (Qty. 8)
020-000169-1: FLAT COUNTERSUNK HEAD SCREW M3*4 SUS304 (Qty. 6)
Assembly Part No: 5087-402970-18 COOL ARM ASSY
5010-301140-11: HOLD PLATE (Qty. 1)
5010-310077-11: COVER (Qty. 1)
5004-400008-11: PIN,CENTERING,(509510016711 (Qty. 3)
5010-407908-11: COVER (Qty. 1)
5010-407909-11: COVER (Qty. 1)
5010-307629-11: ROD (Qty. 2)
5010-406365-11: PLATE,TURN (Qty. 2)
5010-406364-11: BLOCK (Qty. 2)
5010-401259-11: SPACER (Qty. 1)
5010-407905-11: HOLDER(1) (Qty. 2)
5010-310473-11: HOLDER(2) (Qty. 2)
5004-400005-11: GUIDE,COL(509510016811 (Qty. 3)
5010-407906-11: HOLDER(5) (Qty. 2)
5010-407907-11: HOLDER(6) (Qty. 2)
5080-091502-12: COL ARM M-CPHP-NDK (Qty. 1)
5024-000003-11: AIR CYLINDER MDC2-L10-4-X01 (Qty. 1)
5018-000007-12: LM GUIDE RSR-7WZM+50 (Qty. 1)
5086-400746-11: SENSOR,CYLINDER CPHP I/O #02 (Qty. 1)
5041-000246-11: CABLE ASSY 1-1717319-1(CPHP EXT #09) (Qty. 1)
5010-406363-11: PLATE (Qty. 2)
5010-406785-11: BLOCK(1) (Qty. 1)
5010-406786-11: BLOCK(2) (Qty. 1)
022-100487-1: BEARING LF-630ZZ (Qty. 4)
024-015420-1: SPEED CONTROLLER AS1200M-M5 (Qty. 1)
024-020547-1: SPEED CONTROLLER AS1210M-M5 (Qty. 1)
028-002280-1: FITTING,TUBE F900-P-6.35 (Qty. 2)
017-001484-1: TEFLON TUBE NO.9003-BT 1/4B (Qty. 2)
026-007504-1: SIM CIMRS 3-5-0.2 (Qty. 4)
032-000158-1: FALT WASHER M2.6 SUS SMALL CIRCLE (Qty. 2)
020-000506-1: CAP SCREW M2.6*6 SUS304 (Qty. 2)
032-000159-1: FALT WASHER M3 SUS SMALL CIRCLE (Qty. 1)
033-000003-1: NUT M3 SUS304 (Qty. 4)
020-000020-1: CAP SCREW M3*20 SUS304 (Qty. 2)
020-000518-1: CAP SCREW M3*4 SUS304 (Qty. 10)
020-000028-1: CAP SCREW M4*6 SUS304 (Qty. 3)
020-000007-1: CAP SCREW M3*8 SUS304 (Qty. 3)
020-002601-1: BAIND SCREW M3*4 SUS304 (Qty. 2)
020-000821-1: CAP SCREW M3*6 SUS304 W/SPR&FLAT WASHER (Qty. 1)
020-000177-1: FLAT COUNTERSUNK HEAD SCREW M3*8 SUS304 (Qty. 3)
020-000005-1: CAP SCREW M3*6 SUS304 (Qty. 2)
020-000030-1: CAP SCREW M4*8 SUS304 (Qty. 4)
028-003338-1: FITTING,TUBE M-5HL-4 (Qty. 2)
028-005990-1: FITTING,TUBE CF-SUS (Qty. 2)
028-017535-1: FITTING,TUBE M5H-4-DPH00107 (Qty. 4)
020-001234-1: CAP SCREW M2.6*8 SUS304 (Qty. 8)
1380-002378-11: TUBE,SHRINK 6*0.25 (Qty. 1)
020-000519-1: CAP SCREW M3*16 SUS304 (Qty. 2)
Assembly Part No: 5087-401373-18 BASE(E-CPHP) ASSY
5012-000019-11: SOLENOID VALVE SS5Y3-07-X1234 (Qty. 1)
5010-308942-11: BRACKET (Qty. 1)
5010-306347-11: PLATE (Qty. 1)
5010-407062-11: BRACKET (Qty. 1)
5010-306591-11: PAN,DRAIN (Qty. 1)
5010-101635-11: COVER(CPHP) (Qty. 1)
5010-308937-11: BRACKET (Qty. 1)
5010-308936-11: BRACKET (Qty. 1)
5010-400980-11: PLATE (Qty. 1)
5010-308930-11: BASE(R) (Qty. 1)
5010-308932-11: BASE(L) (Qty. 1)
5010-407056-11: BRACEKT (Qty. 1)
5010-407057-11: BRACEKT (Qty. 1)
5010-305982-11: BLOCK (Qty. 1)
5010-101526-11: BASE (Qty. 1)
5003-200010-11: PLATE,COOL (Qty. 1)
5010-306595-11: PLATE (Qty. 1)
5010-308768-11: COVER,CONNECTOR (Qty. 1)
5010-306348-11: PLATE (Qty. 1)
5041-000234-11: CABLE ASSY 1746253-1(THERMO EXT #01) (Qty. 1)
5041-000244-12: CABLE ASSY 1717319-3(CPHP EXT #03) (Qty. 1)
5041-000245-12: CABLE ASSY 1717319-1(CPHP EXT #04) (Qty. 1)
5041-000247-11: CABLE ASSY 1-1717319-5(CPHP EXT #14) (Qty. 1)
5041-000248-11: CABLE ASSY 1-1717319-6(CPHP EXT #15) (Qty. 1)
5041-000249-11: CABLE ASSY 1-1717319-7(CPHP EXT #16) (Qty. 1)
5086-400751-12: CABLE,CPHP EXT #08 (Qty. 1)
5086-404169-11: CABLE,CPHP EXT #17 (Qty. 1)
5086-401771-12: CABLE,CPHP EXT #12 (Qty. 1)
5086-400752-11: CABLE,CPHP SIG #01 (Qty. 1)
5086-400753-11: CABLE,CPHP SIG #02 (Qty. 1)
5086-400754-11: CABLE,CPHP SIG #03 (Qty. 1)
5086-400755-11: CABLE,CPHP SIG #04 (Qty. 1)
5086-400756-11: CABLE,CPHP SIG #05 (Qty. 1)
5086-400758-12: SENSOR,THERMOSTAT CPHP #01 (Qty. 1)
5086-400759-11: CABLE,DC CPHP PWR #01 (Qty. 1)
5041-000230-11: CABLE ASSY 1717320-3(CPHP EMO #01) (Qty. 1)
5086-400761-12: CABLE,CPHP EMO #02 (Qty. 1)
5086-401626-11: CABLE,GND CPHP #01 (Qty. 1)
5086-401777-11: CABLE,CPHP HEAT #01 (Qty. 1)
5086-401778-11: CABLE,CPHP TC #01 (Qty. 1)
5086-401779-11: CABLE,CPHP THERMO #01 (Qty. 1)
2914-000011-12: ACOUSTIC UNIT E5ZT-NW08TC01-2 (Qty. 1)
5010-405925-11: TUBE (Qty. 1)
5010-306138-11: TUBE (Qty. 1)
5010-403750-11: TUBE (Qty. 1)
5010-308935-11: SEAT (Qty. 1)
5010-202632-11: PIPE (Qty. 1)
5010-407045-11: BRACKET (Qty. 1)
5044-000008-11: I/F BOARD TMB2001(BOARD,CONN HPI #01) (Qty. 1)
5010-402221-11: HOLDER (Qty. 1)
5086-404247-11: SENSOR,PRESS CPHP EXH #04 (Qty. 1)
5010-407043-11: BRACKET (Qty. 1)
5044-000005-11: PCB,I/F TMB2200(BOARD,IF TC CTRL #03) (Qty. 1)
028-002956-1: FITTING,TUBE M-5J (Qty. 2)
028-004347-1: FITTING,TUBE KJL06-01S (Qty. 3)
028-003339-1: FITTING,TUBE M-5HL-6 (Qty. 2)
028-004353-1: FITTING,TUBE KJU06-00 (Qty. 1)
028-002258-1: FITTING,TUBE F900-L-6.35A (Qty. 1)
028-003330-1: FITTING,TUBE ELB4-M5-TR (Qty. 2)
026-006336-1: SPACER FWSSS-D5-V3-T1.3 (Qty. 2)
020-002448-1: CAP SCREW M3*70 SUS304 (Qty. 4)
028-002152-1: FITTING,TUBE F900-F-6.35 (Qty. 3)
028-007168-1: FITTING,RESIN EUL1/4-C1 (Qty. 1)
5024-000109-11: DAMPER AS-DPH00222 (Qty. 1)
044-000045-1: SUPPORT,PCB EM-5 (Qty. 8)
044-000044-1: SUPPORT,PCB EM-3 (Qty. 2)
020-001178-1: CAP SCREW M3*30 SUS304 (Qty. 4)
032-000005-1: FLAT WASHER M3 SUS304 POLISHED ROUND (Qty. 2)
020-000005-1: CAP SCREW M3*6 SUS304 (Qty. 15)
020-001720-1: SET SCREW PT1/8 SUS TAPER PLUG 1-TYPE (Qty. 4)
020-000518-1: CAP SCREW M3*4 SUS304 (Qty. 22)
020-000042-1: CAP SCREW M4*20 SUS304 (Qty. 2)
028-002197-1: FITTING,TUBE F900-H-6.35A (Qty. 1)
020-002602-1: BIND SCREW 3M*6 SUS304 (Qty. 2)
211 028-003337-1: FITTING,TUBE M-5H-4 (Qty. 12)
212 024-012193-1: SPEED CONTROLLER INA-14-176(199880070511 (Qty. 12)
213 024-004534-1: SPEED CONTROLLER AS2001F-06 (Qty. 2)
215 020-000090-1: CAP SCREW M6*20 SUS304 (Qty. 1)
216 020-000009-1: CAP SCREW M3*10 SUS304 (Qty. 8)
217 020-000032-1: CAP SCREW M4*10 SUS304 (Qty. 17)
219 032-000267-1: FLAT WASHER M4 SUS304 SMALL CIRCLE (Qty. 2)
220 028-003338-1: FITTING,TUBE M-5HL-4 (Qty. 2)
Sale Details
Item Condition:
Used Working, 90 Day Warranty
Estimated Packed Shipping Dimensions:
L x W x H = 55"x27"x22" @ 190 lbs.; Requires Freight Shipping
Only items pictured are included:
If a part is not pictured, or mentioned above, then it is not included in the sale. Pictured test equipment is not included or available for sale.
For items with multiple quantities:
The pictured item is not necessarily the one that will be sent. Serial numbers or country of manufacture may vary.
Items are sold with a
90-Day Satisfaction Guarantee
(see details below)
Lister 12